Plasma processing apparatus

ABSTRACT

A plasma processing method in which a stable process region can be ensured in a wide range, from low microwave power to high microwave power. The plasma processing method includes making production of plasma easy in a region in which production of plasma by continuous discharge is difficult, and plasma-processing an object to be processed, with the generated plasma, wherein the plasma is produced by pulsed discharge in which ON and OFF are repeated, radio-frequency power for producing the pulsed discharge, during an ON period, is a power to facilitate production of plasma by continuous discharge, and a duty ratio of the pulsed discharge is controlled so that an average power of the radio-frequency power per cycle is power in the region in which production of plasma by continuous discharge is difficult.

CLAIM FOR PRIORITY

This application is a continuation of application Ser. No. 13/363,415,filed on Feb. 1, 2012, now allowed, which claims the benefit of JapaneseApplication No. 2011-163831 filed on Jul. 27, 2011, Japanese patentapplication No. 2011-211896 filed on Sep. 28, 2011 and Japanese patentapplication No. 2011-232446 filed on Oct. 24, 2011, in the JapanesePatent Office, the disclosures of which are incorporated herein byreference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a plasma processing method and a plasmaprocessing apparatus, and particularly to a plasma processing method anda plasma processing apparatus related to plasma etching.

2. Description of the Related Art

One of plasma etching apparatuses currently used for the mass productionof semiconductor devices is an electron cyclotron resonance (hereinafterreferred to as ECR) type apparatus. In this plasma etching apparatus, byapplying a magnetic field to a plasma, and setting magnetic fieldstrength so that the frequency of a microwave resonates with thecyclotron frequency of electrons, a high density plasma can begenerated.

With the miniaturization of semiconductor devices in recent years, thethickness of the gate oxide film has been 2 nm or less. Therefore, ithas been necessary to achieve the controllability of plasma etchingprocessing, and a high selection ratio of the gate oxide film to thesilicon film.

One of techniques for achieving the high precision plasma etching is aplasma etching method using pulsed discharge. For example, JapanesePatent Laid-Open Publication No. 09-185999 (Patent Document 1) disclosesa method for attaining high precision etching by pulse-modulating aplasma, while measuring radical density in the plasma, to control theradical density.

In addition, Japanese Patent Laid-Open Publication No. 09-092645 (PatentDocument 2) discloses a method for pulse-modulating a plasma andsimultaneously synchronizing the phase of a radio-frequency bias appliedto a wafer with the ON-OFF of the plasma to control the temperature ofelectrons in the plasma to prevent the dielectric breakdown of an oxidefilm on the wafer being processed.

In addition, Japanese Patent Laid-Open Publication No. 08-181125 (PatentDocument 3) discloses a method for preventing the dielectric breakdownof an oxide film and simultaneously attaining high rate anisotropicetching by pulse-modulating a plasma at 10 to 100 μs and applying aradio-frequency bias at 600 KHz or less to a wafer.

In addition, Japanese Patent Laid-Open Publication No. 06-267900 (PatentDocument 4) discloses a method for pulse-modulating a microwave forgenerating a plasma, to control radicals, and suppressing theinstability of the plasma to decrease ion temperature.

Generally, an ECR type plasma etching apparatus has three problems asshown below.

The first problem is that there is a case where a lower density region(lower microwave power) is required according to processing, such as foran improvement in perpendicularity, but when the microwave power isdecreased in order to decrease the plasma density, the production of aplasma is difficult.

The second problem is that when a discharge test is performed changingthe power of the microwave, there is an unstable region in which thelight emission of the plasma is seen as flickering in visual inspectionor measurement by a photodiode or the like, depending on the microwavepower. There is no reproducibility of characteristics, such as anetching rate, in this region, and therefore, etching conditions are setavoiding the unstable region, that is, a narrow process window is set inprocess development.

The discharge flicker of interest in the present invention is aphenomenon in which the electric field strength distribution within thechamber changes, depending on the microwave power, abnormal discharge isgenerated, for example, near the sample stage or near the microwavetransmission window, in connection with the chamber shape, and blinkingcan be observed by visual inspection.

The third problem is that there is a high selection ratio region on thehigh microwave power side (high density region), but on the highmicrowave power side, a cut-off phenomenon occurs with an increase inplasma density, and a mode jump in which the distribution of plasmadensity in the chamber changes occurs. When this phenomenon occurs, thelight emission intensity of the plasma and the peak value of the biasvoltage (Vpp voltage) change suddenly, and with this, the distributionof the etching rate in the wafer surface also changes largely, andtherefore, power around the mode jump can not be used.

These three problems are also common to an ECR type plasma etchingapparatus using pulsed discharge. But, in the above-describedconventional techniques, these three problems are not considered.

Therefore, the present invention provides a plasma processing method anda plasma processing apparatus in which a stable process region can beensured in a wide range, from low microwave power to high microwavepower.

SUMMARY OF THE INVENTION

The present invention is a plasma processing method for facilitatingproduction of a plasma in a region in which production of a plasma bycontinuous discharge is difficult, and plasma-processing an object to beprocessed with such generated plasma, the method including: using pulseddischarge in which ON and OFF are repeated to facilitate production ofthe plasma, wherein radio-frequency power for producing the pulseddischarge, during an ON period, is such a power as to facilitate theproduction of a plasma by the continuous discharge, and a duty ratio ofthe pulsed discharge is controlled so that an average power of theradio-frequency power per cycle matches power in the region in which theproduction of a plasma by the continuous discharge is difficult.

In addition, the present invention is a plasma processing apparatusincluding a processing chamber in which a plasma is produced, plasmaproduction means for producing the plasma, and a sample stage, on whicha wafer is placed, provided within the processing chamber, and etchingthe wafer with the plasma, wherein the plasma production means includesa power supply for supplying power for producing the plasma, and atime-average value of the power is controlled by ON-OFF-modulating thepower of the power supply, setting peak power during ON to a value atwhich when a plasma is generated by continuous discharge, instability ofthe plasma does not occur, and changing a duty ratio of the ON-OFFmodulation.

In addition, the present invention is a plasma processing apparatusincluding a chamber which can be evacuated to introduce a reactive gas,a plasma production power supply for producing a discharge plasma withinthe chamber, and a sample stage, on which a wafer is mounted, within thechamber, further including means for pulse-modulating an output power ofthe plasma production power supply, setting peak power during ON to apower value sufficiently higher than a mode jump region in continuousdischarge, and changing a duty ratio of the pulse modulation to controla time-average value of the power.

According to the present invention, a stable process region can beensured in a wide range, from low microwave power to high microwavepower.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic cross-sectional view showing one example of aplasma etching apparatus for carrying out the etching method of thepresent invention;

FIG. 2 shows the output waveform of the magnetron 106 of the apparatusshown in FIG. 1;

FIG. 3 is a graph showing the effect of improving a selection ratioaccording to the present invention;

FIG. 4 is a graph showing the dependence of the light emission intensityof oxygen atoms on the time-average output of a microwave according tothe present invention;

FIG. 5 is a schematic cross-sectional view of a plasma etching apparatuswhich performs feedback control in which the duty ratio of pulseddischarge is changed for each wafer according to the ExemplaryEmbodiment 4 of the present invention;

FIG. 6 is a cross-sectional view of a fine pattern on a wafer to beprocessed;

FIG. 7 is a diagram showing the data of the correlation betweenmicrowave power (duty ratio) and CD in the Exemplary Embodiment 4 of thepresent invention;

FIG. 8 is a schematic cross-sectional view showing a plasma etchingapparatus in the Exemplary Embodiment 5 of the present invention;

FIG. 9 is a graph showing an O (oxygen)/Br (bromine) light emissionintensity ratio with respect to a microwave according to the presentinvention;

FIG. 10 is a graph showing a polysilicon/silicon oxide film selectionratio with respect to a pulsed microwave according to the presentinvention; and

FIG. 11 is a process flow chart of an apparatus for automating themeasurement of power in which a mode jump occurs.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

First, one example of a plasma etching apparatus for carrying out thepresent invention will be described with reference to the drawings. FIG.1 is a schematic cross-sectional view of a microwave ECR plasma etchingapparatus using a microwave and a magnetic field for plasma productionmeans.

The microwave ECR plasma etching apparatus includes a chamber 101 whichcan be evacuated, a sample stage 103 on which a wafer 102, an object tobe processed, is disposed, a microwave transmission window 104, such asquartz, provided on the upper surface of the chamber 101, a waveguide105 and a magnetron 106 provided above the microwave transmission window104, a solenoid coil 107 provided around the chamber 101, and anelectrostatic adsorption power supply 108 and a radio-frequency powersupply 109 connected to the sample stage 103.

The wafer 102 is carried into the chamber 101 from a wafer carry-in port110, and then electrostatically adsorbed on the sample stage 103 by theelectrostatic adsorption power supply 108. Next, a process gas isintroduced into the chamber 101. The chamber 101 is evacuated to reducepressure by a vacuum pump (not shown), and adjusted to a predeterminedpressure (for example, 0.1 Pa to 50 Pa). Next, a microwave having afrequency of 2.45 GHz is oscillated from the magnetron 106, andpropagated into the chamber 101 through the waveguide 105. The processgas is excited by the action of the microwave and a magnetic fieldgenerated by the solenoid coil 107, and a plasma 111 is formed in aspace above the wafer 102. On the other hand, a bias is applied to thesample stage 103 by the radio-frequency power supply 109, and ions inthe plasma 111 are perpendicularly accelerated onto the wafer 102 andenter the wafer 102. In addition, the radio-frequency power supply 109can apply continuous radio-frequency power or time-modulatedintermittent radio-frequency power to the sample stage 103.

The wafer 102 is anisotropically etched by the action of radicals andions from the plasma 111. In addition, a pulse generator 112 is attachedto the magnetron 106, and thus, the microwave can be pulse-modulated ina pulse form at a repetition frequency which can be optionally set, asshown in FIG. 2.

In addition, when the microwave ECR plasma etching apparatusplasma-processes the wafer 102, a control part 113 controls each of themagnetron 106, the pulse generator 112, the solenoid coil 107, theradio-frequency power supply 109, and the electrostatic adsorption powersupply 108 described above.

The microwave ECR plasma etching apparatus according to the presentinvention, used in Exemplary Embodiments described below, is a microwaveECR plasma etching apparatus which processes a wafer having a diameterof 300 mm. The inner diameter of the chamber 101 is 44.2 cm, and thedistance between the wafer 102 and the microwave transmission window 104is 24.3 cm (the volume of the space in which the plasma is generated:37267 cm³).

Next, the present invention for solving the first problem will bedescribed by Exemplary Embodiment 1 and Exemplary Embodiment 2. Thefirst problem is that when the microwave power is decreased in order todecrease the plasma density, the production of a plasma is difficult.

Exemplary Embodiment 1

The ignition characteristics of a plasma, depending on the duty ratio,and the time-average output of the microwave, were examined underconditions shown in Table 1, using the microwave ECR plasma etchingapparatus shown in FIG. 1. Vpp in Table 1 is the voltage differencebetween a peak value and a peak value of a radio-frequency voltageapplied to the sample stage 103.

In addition, the results of examining plasma production are shown inTable 2. “Good” in Table 2 indicates that a plasma was stably produced,and “Poor” indicates that a plasma could not be stably produced.

TABLE 1 HBr gas 200 ml/min O₂ gas 3 ml/min Ar gas 200 ml/min Ar +CH₄(4%) gas 30 ml/min Process pressure 0.8 Pa RF bias Vpp 350 V constant(about 40 W) Microwave ON-OFF repetition 5 kHz frequency

TABLE 2 Microwave time-average output (W/cm³) 0.0027 0.0054 0.007 0.00860.011 (about (about (about (about (about Duty ratio 100 W) 200 W) 260 W)320 W) 400 W) 20% Good Good Good Good Good 50% Poor Good Good Good Good65% Poor Poor Good Good Good 80% Poor Poor Poor Good Good 100% Poor PoorPoor Poor Good (Continuous discharge)

From Table 2, in the case of continuous discharge, a plasma is stablyproduced when a value obtained by dividing the time-average output ofthe microwave by the volume of the inner wall of the chamber 101 is0.011 W/cm³ (about 400 W) or more, and a plasma is not produced when thevalue is less than 0.011 W/cm³. The reason why a plasma is not producedis that the energy required for free electrons to ionize the moleculesof the etching gas is not supplied. But, in the cases of discharge witha pulsed microwave, a plasma is produced even if a value obtained bydividing the time-average output of the microwave by a volume in whichthe plasma is produced is smaller than 0.011 W/cm³.

This difference in plasma production between by the continuous dischargeand by the pulsed microwave discharge is due to the following reason.

During several μsec during a period during which the microwave is ON,free electrons ionize or dissociate other atoms and molecules withenergy obtained from the microwave, to produce the plasma 111. Then,during a period during which the microwave is OFF, most of the freeelectrons are captured by the atoms and the molecules during severalμsec, and a large portion of the plasma 111 forms anions and cations.Since the anions and the cations have a larger mass than the electrons,the anions and the cations collide with each other and are neutralized,and a time of several tens of ms is required until the plasma 111dissipates. Therefore, when the OFF time of the microwave is shorterthan 10 ms, the ON period of the microwave starts before the plasma 111dissipates, and the plasma 111 is maintained.

Therefore, when the results shown in Table 2 are put another way, it canbe said that when the output during the ON period of the pulsedmicrowave is equal to or more than the minimum output required to stablyproduce a plasma by continuous discharge (that is, 0.011 W/cm³ or more),a plasma can be stably produced even if the time-average output of thepulsed microwave is 0.011 W/cm³ or less. Further, it can be said thatwhen the OFF period of the pulsed microwave is 10 ms or less, a plasmacan be more stably produced than the above-described plasma processingmethod, even in a region in which the time-average output of the pulsedmicrowave is 0.011 W/cm³ or less.

Further, a plasma is easily stably produced by adding an inert gas, suchas an argon gas (Ar, ionization energy: 1520.6 kJ/mol) or a nitrogen gas(N₂, ionization energy: 1402 kJ/mol), or adding an easily ionizable gasother than the above inert gas. The type of other gases, the flow rateof each gas, the process pressure, the RF bias value, and the like donot specially limit the effect of this Exemplary Embodiment.

Next, a wafer having a polysilicon film on the entire surface thereofand a wafer having a silicon oxide film on the entire surface thereofwere etched under the conditions in Table 1, and a selection ratio wasobtained from the ratio of their respective amounts of etching. Theresults are shown in FIG. 3. “%” in FIG. 3 means a duty ratio whenpulsed discharge was performed.

From FIG. 3, it is seen that when the duty ratio is 50% or less, and themicrowave time-average output is 400 W (0.011 W/cm³) or less, theselection ratio increases more than in continuous discharge. The reasonfor this is considered to be that when the time-average output of themicrowave is small, the number of free electrons within the chamber 101decreases, and electrons corresponding to this decrease excite atoms andmolecules, and therefore, the density of the radical species increases,and the selection ratio is improved.

In addition, the selection ratio is further increased by controlling theoxygen gas in the conditions in Table 1 at 1 ml/min or more and 10ml/min or less.

In addition, while this Exemplary Embodiment is an example in which theplasma processing method of the present invention is applied to themicrowave ECR plasma etching apparatus, the plasma processing method ofthe present invention can be similarly applied to a capacitively coupledor inductively coupled plasma etching apparatus. As described above, theplasma processing method of the present invention is a method forprocessing an object to be processed by pulsed discharge in which theradio-frequency power during the ON period of the pulsed discharge isradio-frequency power in which a plasma by continuous discharge can bestably produced, and the OFF period of the pulsed discharge is 10 ms orless. By such a plasma processing method of the present invention, aplasma can be stably produced even in a region in which the plasmaproduction power is small, in which it is difficult to stably produce aplasma.

Further, in the plasma processing method of the present invention, whenthe duty ratio of the pulsed discharge is 50% or less, the selectionratio of the etching rate of the polysilicon film to the silicon oxidefilm can be more improved than in continuous discharge.

Exemplary Embodiment 2

Next, another Exemplary Embodiment of the present invention described inExemplary Embodiment 1 will be described.

When plasma processing by pulsed discharge is performed under conditionsshown in Table 3, the performance of the removal of the carbon-baseddeposits and the removal of the resist is more improved than incontinuous discharge.

TABLE 3 Oxygen (O₂) gas 200 ml/min Process pressure 1.0 Pa RF bias 0 WMicrowave ON-OFF repetition 5 kHz frequency

The ratio of the light emission intensity of oxygen to the lightemission intensity of argon was measured, adding an argon gas at 5ml/min under the conditions shown in Table 3. The results are shown inFIG. 4.

From FIG. 4, it is seen that the light emission intensity of oxygenatoms is strong at less than 0.011 W/cm³, a value obtained by dividingthe time-average output of the microwave by a volume in which the plasmais generated.

In other words, when the pulsed discharge of the present invention isperformed under the conditions shown in Table 3, the oxygen radicaldensity increases, and the effect of the removal of the carbon-baseddeposits and the removal of the resist is improved.

Next, the present invention for solving the second problem will bedescribed by Exemplary Embodiment 3 to Exemplary Embodiment 5. Thesecond problem is that when a discharge test is performed changing thepower of the microwave, there is an unstable region in which the lightemission of the plasma is seen as flickering in visual inspection ormeasurement by a photodiode or the like, depending on the microwavepower.

Exemplary Embodiment 3

The plasma etching in this Exemplary Embodiment used the microwave ECRplasma etching apparatus shown in FIG. 1. Next, an example of conditionsfor etching a polysilicon film 302 is shown in Table 4. Under theconditions, the polysilicon film 302 can be etched at a high selectionratio to a base oxide film 303.

TABLE 4 HBr gas 140 ml/min O₂ gas 2 ml/min Process pressure 1.6 Pa RFbias (output per wafer 50 W(0.071 W/cm²) area)

Changing the microwave for generating a plasma, under the conditionsshown in Table 4, light emission from the plasma 111 was detected by aphotodiode, and its flicker was measured. The results are shown in Table5. For the power of the microwave, a case where continuous discharge wasperformed is compared with a case where the power was controlled bysetting the power during the ON period of the microwave to 1500 W,performing ON-OFF modulation at a repetition frequency of 1 KHz, andchanging the duty ratio. In Table 5, “Good” indicates that there was nodischarge flicker, and “Poor” indicates that there was dischargeflicker. Etching cannot be performed in a state in which dischargeflickers.

TABLE 5 Time-average microwave power (W) 400 500 600 700 800 900 10001100 1200 1300 1400 1500 Continuous Good Good Good Good Good Poor PoorPoor Good Good Good Good discharge Pulsed Good Good Good Good Good GoodGood Good Good Good Good Good discharge (peak power: 1500 W)

In the continuous discharge, flicker occurs at 900 W to 1100 W, but theflicker of the discharge can be eliminated by the ON-OFF control of themicrowave. The reason is presumed to be that the plasma 111 generated byinstantaneous power is set to be in a stable region, and further, whenpulsed discharge is performed with the plasma 111 of a gas that easilyforms negative ions, such as a halogen gas, electrons disappear inseveral tens of μs during OFF, and for several ms after this, negativeions and positive ions are involved in maintaining the discharge, andtherefore, the state of the sheath of the plasma 111 produced at theinterface between the chamber wall and the plasma 111 is different fromthat in continuous discharge, and the flicker is eliminated.

The time until the plasma 111 dissipates is several tens of ms, andtherefore, when the OFF time is 10 ms or less, ON starts before theplasma 111 dissipates, and the plasma is maintained.

The power region in which the plasma 111 flickers depends on theconditions. Therefore, in etching under other conditions, flicker can beeliminated when, first, the microwave power is changed in continuousdischarge to check a region in which the discharge flickers, as in Table5, to set the power during the ON period of the microwave sufficientlylarger than power in which flicker occurs, and the microwave is ON-OFFpulse-modulated at a frequency at which the OFF time is 10 ms or less.

When the size of the chamber 101 changes, the power of the microwaveshown in Table 5 changes according to its volume. 1500 W corresponds toabout 0.04 W/cm³ when converted to microwave power per unit volume.

The fact that there is an unstable region in discharge is not limited tomicrowave plasma etching apparatuses. Inductively coupled orcapacitively coupled plasma etching apparatuses also have a similarproblem. Also in these apparatuses, discharge instability can be avoidedby the present invention.

Exemplary Embodiment 4

Next, an Exemplary Embodiment concerning a method for controlling anetching processing dimension (hereinafter referred to as “CD”) enabledby the ON-OFF modulation of the plasma 111 will be described. FIG. 5shows a schematic view of a plasma etching apparatus in which amechanism for measuring an etching end time obtained from the lightemission intensity of the plasma 111 or a change in light emissionintensity, or the like, and, based on this monitored value, changing theetching conditions of the wafer 102 being processed or the wafer 102 tobe processed next is added to the microwave ECR plasma etching apparatusshown in FIG. 1.

A light receiving part 202, a CD calculation part 203, a recipecalculation part 205, a first database 206, a second database 204, andan etching control PC 207 shown in FIG. 5 are communicatively coupledvia communication means. FIG. 6 is a cross-sectional view of a finepattern on the wafer 102 to be processed and shows a state in which apolysilicon film 302 lying on a silicon substrate 304 and a base oxidefilm 303 is etched in the form of the same pattern as a mask 301, suchas silicon nitride, processed in the form of a fine pattern.

In dry etching, usually, processing as shown in FIG. 6 is continuouslyperformed for 1 lot (25 wafers). The processed line width (hereinafterreferred to as “CD”) needs to be within a certain tolerance during thecontinuous processing. But, there is a case where reaction products ofetching, and the like adhere to the inside of the chamber 101, and soon, and thus, the plasma state changes with time, and the fluctuationsin CD are not within a tolerance.

In this Exemplary Embodiment, the fluctuations in CD are controlledwithin a tolerance by ON-OFF-modulating the plasma 111 and changing theduty ratio for each wafer. Usually, the CD changes, depending on thebias power applied to the wafer 102, and the plasma density, that is,the microwave power, and therefore, the CD can be changed by changingthe microwave power.

Next, a specific method will be described. The end point of the etchingof the polysilicon film 302 shown in FIG. 6 is detected by the lightemission of a reaction product in the plasma 111, for example, light ofsilicon having 426 nm, by an optical fibre 201 and the light receivingpart 202. There is a correlation between the end time of etching and CD,and the relationship between the etching end time and CD is stored inthe second database 204. The CD calculation part 203 calculates anestimate of the CD of this wafer 102 from the etching end time. Thedifference between the calculated CD and a CD target value iscalculated, and the value of this difference is sent to the recipecalculation part 205.

The recipe calculation part 205 has the first database 206 in which thedata of the correlation between microwave power (duty ratio) and CDshown in FIG. 7 is stored, and calculates the variable of microwavepower required to make the difference from the target value of CD zero.For example, as shown in FIG. 7, when the target CD is 30 nm, and the CDof the n-th wafer is 30+a (nm), the average microwave power, that is,the duty ratio, for the n+1-th wafer is increased by d (%) in order toachieve the target CD, that is, in order to narrow CD by a (nm).

The duty ratio calculated from the first database 206 is sent to theetching control PC 207. When the next wafer 102 is processed, etching isperformed setting this value. At this time, when the plasma 111 iscontinuously discharged, the microwave power value corrected so that theCD difference is zero may be in the unstable region of the plasma 111shown in Table 5, which hinders etching. As described in ExemplaryEmbodiment 3, when the microwave power is controlled byON-OFF-modulating the plasma 111 and changing the duty ratio, theproblem of the instability of the plasma 111 can be eliminated.

Exemplary Embodiment 5

Next, a method that increases the margin of stability more when used incombination with the present invention in order to prevent dischargeinstability will be described by FIG. 8. First, in order to stabilizethe potential of the plasma 111, it is desired to provide an earthsurface 401 through which a direct current flows, in a portion to be incontact with the plasma 111.

Usually, the inner wall of the chamber 101 is subjected to stabilizationwith alumite, yttrium oxide, or the like. These materials areinsulators, and therefore, a direct current does not flow through them.By peeling these insulating films, inserting a conductor, or the like,in part of the portion to be in contact with the plasma 111, and furthersetting the conductor portion at an earth potential, the potential ofthe plasma 111 is stabilized, and therefore, the discharge is morestabilized. It is desired that the area of the direct current earthsurface 401 is 10 cm² or more.

Next, it is desired that the pressure of the process gas is set to 0.1to 10 Pa. If the pressure is too low, the mean free path of electronsincreases, and a chance that the electrons dissipate on the wall beforeionization occurs increases, which causes the instability of the plasma111. In addition, if the pressure is too high, the ignitioncharacteristics worsen, and instability occurs easily.

Further, for the shape of the chamber 101 and the sample stage 103, itis desired to decrease portions in which the electric field is locallystrong to a minimum. In other words, sharp unevenness should not beprovided, and a corner portion 402 should have a curve having a radiusof 5 mm or more.

Next, the present invention for solving the third problem will bedescribed by Exemplary Embodiment 6 and Exemplary Embodiment 7. Thethird problem is that there is a high selection ratio region on the highmicrowave power side (high density region), but on the high microwavepower side, a cut-off phenomenon occurs with an increase in plasmadensity, and a mode jump in which the distribution of plasma density inthe chamber changes occurs.

Plasma etching in Exemplary Embodiment 6 and Exemplary Embodiment 7 wasperformed using the microwave ECR plasma etching apparatus shown in FIG.1.

Exemplary Embodiment 6

As shown in FIG. 3, the polysilicon-to-silicon oxide film selectionratio also increases in a region in which the average microwave power islarge (800 W or more). In order to explain the reason for this, therelationship between microwave power and the light emission intensityratio of O (oxygen) to Br (bromine) is shown in FIG. 9. As is seen fromFIG. 9, the light emission intensity of O (oxygen), that is, the densityof O radicals, increases on the high microwave side. Therefore, it isconsidered that the etching of the silicon oxide film is suppressed, andthe selection ratio is improved.

However, when the microwave power value is further increased, a suddenchange in light emission intensity, that is, the above mode jumpphenomenon (during CW) 500, occurs at a microwave power value of 900 Wor more in CW (continuous discharge), as shown in FIG. 9. Therefore, thehigh microwave region can not be used in continuous discharge.

Therefore, in the present invention, the microwave is pulsed, the peakpower during ON is set sufficiently higher than the power value at whichthe mode jump occurs, and the duty ratio is controlled. It is seen thatat a duty of 65% or less, there is no sudden change in light emissionintensity ratio (FIG. 9), that is, a mode jump is avoided.

The reason for this is presumed as follows. In the CW (continuousdischarge), the electron density increases with the microwave powervalue, and the mode changes from a power value at which a density atwhich the oscillation of the plasma 111 resonates with the frequency ofthe electromagnetic wave is reached. On the other hand, with the pulsedmicrowave, during OFF, most of free electrons are captured by atoms andmolecules during several μsec, and a large portion of the plasma 111forms anions and cations. Therefore, with the pulsed microwave in whichON-OFF is repeated, an increase in electron density does not occur.

The results of the selection ratio evaluated on the high microwave powerside, using the conditions in Table 1, are shown in FIG. 10. In the CW(continuous discharge), the selection ratio decreases (becomes unstable)at a microwave power value of 900 W or more due to the effect of themode jump, whereas by pulsing the microwave, the high microwave powerside can be used, and a high selection ratio can be obtained.

It is known that, generally, in pulsed discharge, the electron densitydecreases by one or more orders of magnitude in 50 μs after the power isturned OFF. Therefore, when discharge is pulsed, and the repetitionfrequency of the pulse and the duty ratio are set so that the OFF timeof the pulsed discharge is 50 μs or more, a mode jump can besufficiently avoided.

As described above, in the present invention, by pulse-modulating themicrowave, a mode jump which occurs on the high microwave power side canbe avoided, and the process region effective for etching can beexpanded.

Exemplary Embodiment 7

Next, a method and an apparatus for automatically avoiding this modejump region will be described. A mode jump occurs in a high power regionof a microwave power of about 900 W or more, as shown in FIG. 9. Thedensity of the plasma 111 is different depending on the pressure of thegas and the type of the gas, and therefore, the power in which a modejump occurs is also different depending on these conditions.

In the method for avoiding this, first, a power value at which a modejump occurs under the conditions used is previously measured, and theapparatus is adapted to include the function of storing etchingconditions and power in which a mode jump occurs under the conditions,and automatically pulse-modulating microwave power when using the powerin which a mode jump occurs under the conditions. In an apparatus havingthis function, the erroneous operation of erroneously using a mode jumpregion can be prevented.

Further, an apparatus for previously automating the measurement of powerin which a mode jump occurs will be described. A process flow chart ofan apparatus for automating the measurement of power in which a modejump occurs is shown in FIG. 11. Usually, etching is performed in a lot(25 wafers) unit. Before a lot is processed, dummy wafer processing 501is performed under the same conditions as the subsequent processingconditions.

Then, lot processing 502, and the cleaning 503 of the chamber 101 withthe plasma 111 of oxygen, or the like follow. The dummy wafer processing501 includes microwave power automatic scanning measurement 504 which isthe step of automatically scanning microwave power set values, forexample, 800 W to 1200 W, and measuring the light emission intensity ofthe plasma 111 during this period by a photodiode or the like.

Next, an etching apparatus-controlling personal computer 507 includesthe function of performing mode jump power identification 505 in whichfrom this data, a region in which the light emission intensity changessuddenly is extracted and stored, and further performing automaticrecipe generation 506 in which pulse modulation is automaticallyperformed when the microwave power corresponds to the mode jump regionwhen a recipe is input. Due to this function, a worker can performetching without being troubled by the mode jump region.

In addition, the physical amount that is measured when the microwavepower is scanned is not limited to light emission intensity. An amountthat changes suddenly according to a mode jump, such as the peak valueof a bias voltage (Vpp), can serve the same function. In addition, theabsolute value of the microwave power described in the present inventionchanges largely, mainly according to the size of the chamber 101, thatis, the diameter of the wafer 102 to be processed. As a standard, when avalue normalized by the volume of the chamber 101 is used, the microwavepower can be converted to an amount that does not depend on the volumeof the chamber 101. For example, 900 W corresponds to 0.024 W/cm³ in theabove Exemplary Embodiments.

1-4. (canceled)
 5. A plasma processing apparatus, comprising: aprocessing chamber configured to plasma etch a wafer; a radio-frequencypower supply configured to supply radio-frequency power for generatingplasma into the processing chamber; a pulse generator configured togenerate pulse for ON-OFF modulation of the radio-frequency power; asample stage configured to hold the wafer; and a control unit configuredto ON-OFF modulate the radio-frequency power for generating plasma,wherein the control unit is configured to set a power during ON of theON-OFF modulated radio-frequency power to a power value in a region inwhich plasma instability does not occur when generating plasma bycontinuous discharge, and is configured to control a duty ratio of theON-OFF modulation such that a product of the power during ON of theON-OFF modulated radio-frequency power which is set to the power valuein the region in which plasma instability does not occur when generatingplasma by continuous discharge, and the duty ratio of the ON-OFFmodulation, becomes a power value in a region in which plasmainstability occurs when generating plasma by continuous discharge. 6.The plasma processing apparatus according to claim 5, wherein thecontrol unit sets an OFF period of the pulse to a period of 10 ms orless.
 7. The plasma processing apparatus according to claim 5, whereinthe radio-frequency power is a microwave radio-frequency power, and theplasma processing apparatus further comprises a magnetic fieldgeneration means which generates in the processing chamber a magneticfield that produces the plasma by an interaction with the microwave. 8.A plasma processing apparatus, comprising: a processing chamberconfigured to plasma etch a wafer; a radio-frequency power supplyconfigured to supply radio-frequency power for generating plasma intothe processing chamber; a pulse generator configured to generate pulsefor ON-OFF modulation of the radio-frequency power; a sample stageconfigured to hold the wafer; and a control unit configured to ON-OFFmodulate the radio-frequency power for generating plasma, wherein thecontrol unit is configured to set a power during ON of the ON-OFFmodulated radio-frequency power to a power value higher than a mode jumpregion when generating plasma by continuous discharge, and is configuredto control a duty ratio of the ON-OFF modulation such that a product ofthe power during ON of the ON-OFF modulated radio-frequency power whichis set to the power value higher than the mode jump region whengenerating plasma by continuous discharge, and the duty ratio of theON-OFF modulation, becomes a power value of the mode jump region.
 9. Theplasma processing apparatus according to claim 8, wherein the duty ratiois set to 65% or less, and wherein an OFF time of the ON-OFF modulationis set to 50 μs or more.
 10. The plasma processing apparatus accordingto claim 8, wherein the radio-frequency power is a microwaveradio-frequency power, and the plasma processing apparatus furthercomprises a magnetic field generation means which generates in theprocessing chamber a magnetic field that produces the plasma by aninteraction with the microwave.
 11. A plasma processing apparatus,comprising: a processing chamber configured to plasma etch a wafer; aradio-frequency power supply configured to supply radio-frequency powerfor generating plasma into the processing chamber; a pulse generatorconfigured to generate pulse for ON-OFF modulation of theradio-frequency power; a sample stage configured to hold the wafer; anda control unit configured to scan power of a microwave radio-frequencypower, wherein the control unit is configured to detect a mode jumpregion, based on a rate of change of a light emission intensity duringscanning period, or based on a rate of change of a bias voltage appliedto the sample stage during the scanning period, ON-OFF modulates themicrowave, when generating plasma by power in the mode jump region, isconfigured to set a power during ON of the ON-OFF modulated microwave toa power value higher than the detected mode jump region, and isconfigured to control a duty ratio of the ON-OFF modulation such that aproduct of the power during ON of the ON-OFF modulated microwave whichis set to a power value higher than the detected mode jump region, andthe duty ratio of the ON-OFF modulation, becomes a power value of thedetected mode jump region.